GMOS

The TODOS Gas sensor, dubbed GMOS, is a miniature, combustion-type gas sensor based on a thermal sensor, where a micro-machined CMOS-SOI transistor acts as a sensing element and is integrated with a catalytic reaction plate and an embedded tungsten resistive heater. The suspended transistor (dubbed TMOS) exhibits exceptionally high sensitivity to the change in the temperature caused by the gas's combustion reaction on the catalytic reaction plate. The temperature change is translated to the gas concentration. The suspended reaction plate's low thermal mass enables rapid heating and cooling, which is advantageous for pulse mode operation for low power consumption.